[HN Gopher] How Foundries Calculate Die Yield
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How Foundries Calculate Die Yield
Author : klelatti
Score : 22 points
Date : 2024-09-15 18:37 UTC (4 hours ago)
(HTM) web link (www.viksnewsletter.com)
(TXT) w3m dump (www.viksnewsletter.com)
| sevensor wrote:
| The defect math is interesting, but process uniformity is more of
| a killer than the author gives it credit for. Fantastic amounts
| of ingenuity go into showerhead design, chamber design, and
| minute changes to process conditions, not to mention maintenance
| practices. We'd like to pretend the pattern and the process are
| orthogonal, but they're coupled, and you might need to run 5C
| colder for one product versus another simply because the material
| exposed by the pattern loads the chamber differently. And how
| about water spots? Wet processing leaves water spots, just like
| you might see after washing your dishes. Huge source of defects,
| and once again pattern dependent. Patterning usually leaves
| alternating areas of hydrophilic and hydrophobic material, and
| you have to somehow prevent water from beading up anywhere. Sure,
| it starts out deionized, but it's got plenty of junk in it after
| rinsing your wafers off.
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