https://docs.hackerfab.org/hacker-fab-space LogoLogo More Ask or SearchCtrl + K LogoLogo Ask or SearchCtrl + K * Hacker Fab Documentation * Overview + Current Fab Capabilities o Fab Capabilities November 2023 o Fab Capabilities May 2023 * Guides + Required Reading (todo) + Build-a-Fab + Filling in the Gaps - Background Resources + Part Sourcing * Processes + Self-Aligned NMOS V1 * Fab Toolkit + Patterning o Lithography Stepper V2 Build o Lithography Stepper V1 Build o Getting started with Klayout + Deposition o Thermal Evaporator V1 Build (WIP) o Spin Coater V2 Build (work in progress) o Spin Coater V1 Build (to do) o Electroless Nickel Plating + [?]Etching o Plasma Etcher o HF Jig + [?]Other Processing Machines o Tube Furnace o Cleaving Jig + Metrology / Characterization o Probe Station o Semiconductor Parameter Analyzer # SMU - Analog Discoveries # SMU - Keithley 4200SCS o CV Measurements o Spectrometer o Profilometer + [?][?]Chemicals / Materials o Photoresists o Dielectrics # Spin on Glass o Conductors # Aluminum o Etchants # Hydrofluoric Acid # Aluminum Etchant (Nitric, Acetic, Phosphoric Acids) o Dopant Sources + Automation o Lab Robot + [?]Submodules o Piezo Nanopositioner (Stick Slip) o Interferometer * Standard Operating Procedures + Patterning SOP - Stepper V2 o Vacuum Spin Coater SOP o Hot Plate SOP o Photoresist Strip SOP + Plasma Etcher SOP + Spin on Glass SOP o Spin on Glass Storage and Preparation o Spin on Glass Defect Inspection o Spin on Glass Thickness Measurement + Tube Furnace SOP + Glass Acid Etch SOP + DIY Thermal Evaporator SOP + Evaporator SOP + Aluminum Etch SOP + Probe Station SOP + Probe Station SOP - V2 + Wafer Cleaving SOP + Dry Oxide Growth SOP + Profilometer SOP * WORKING DOCS + NAND + Inverter Characterization * Templates (to do) + Build Manual Template + Bought Equipment Template + Standard Operating Procedure Template + BOM Template + Hardware X Template (for reference) * Archive + Patterning SOP - Stepper V1 Powered by GitBook On this page * intro. * working on the hacker fab. * this website. * fab toolkit. * fabrication tools. * verification / metrology tools. * chemicals. * background and licensing. Edit on GitHub Last updated 4 hours ago discord. github. x. intro. Our Goals: 1. Make integrated circuit prototyping as fast as 3D printing 2. Make DIY version of every nanofabrication tool 3. Get there with collaborative open source hardware Right now we use factories and tools that are optimized to manufacture at scale to do our integrated circuit prototyping. There does not exist a set of machines that enable rapid tape-out of semiconductor devices on a budget, nor are there sufficient resources to make/modify fab tools from the ground up. Nanofabrication is often communicated as complex magic, where every machine is immutable. We believe that innovation in the industry requires a thorough understanding of these machines from first principles, which will lead us to simpler solutions. Even on machines and processes of magnitudes less complexity than modern industry, there are designs worth sharing. The use of low-cost, abundant, and fast-turn-around hardware serves a larger purpose than making the fab cheaper. These design constraints are what enable others to recreate, modify, and contribute to our work. The simpler the better. Number of People Who Have Made a Transistor by Hand in 75 a Hacker Fab Number of Hacker Fabs 3 (+1 in progress) --------------------------------------------------------------------- working on the hacker fab. You don't need prior nanofabrication experience to create meaningful contributions. You do need to read the Required Reading. You don't need to recreate the entire fab to contribute, although you can. We communicate entirely over Discord. --------------------------------------------------------------------- this website. This page is a home for all documentation. There are enough resources here to turn an empty room into one that fabricates simple IC's in a matter of months. Many pages are works in progress, as a lot of documentation is being migrated from our Google Drive. Any contributor can submit change requests with a free Gitbook account. All of this is on Github, but formatted nicely here on Gitbook. For the most up-to-date status on everything, join the Discord. --------------------------------------------------------------------- fab toolkit. Here is a list of all the tools built or bought necessary to make our devices. Every build contains: * BOM * Links to Design Files * Links to Code * First Principles Understanding of Machine Design (WIP) fabrication tools. verification / metrology tools. chemicals. Photoresists + Developers Dielectrics Conductors Etchants Dopant Sources --------------------------------------------------------------------- background and licensing. The Hacker Fab was inspired by Sam Zeloof. The Hacker Fab was started by Elio Bourcart, Alexander Hakim, and Sam Zeloof. The first Hacker Fab was opened at Carnegie Mellon University. The Hacker Fab is run entirely by independent contributors. Hardware: CERN-OHL-W For example, if you release HDL files under CERN-OHL-W and then somebody uses those files in their FPGA, when they distribute the bitstream (either putting it online or shipping a product with it) they do not to make the rest of the HDL design available under CERN-OHL-W as well. https://ohwr.org/project/cernohl/wikis/faq# q-what-are-all-these-suffixes https://ohwr.org/cern_ohl_w_v2.pdf Software: MPL v2.0 The MPL's "file-level" copyleft is designed to encourage contributors to share modifications they make to your code, while still allowing them to combine your code with code under other licenses (open or proprietary) with minimal restrictions. https://www.mozilla.org/en-US/MPL/2.0/ https://www.mozilla.org/en-US/MPL/2.0/FAQ/ Documentation: CC BY-SA 4.0 This license enables reusers to distribute, remix, adapt, and build upon the material in any medium or format, so long as attribution is given to the creator. The license allows for commercial use. If you remix, adapt, or build upon the material, you must license the modified material under identical terms. https://creativecommons.org/ licenses/by-sa/4.0/ https://creativecommons.org/share-your-work/ cclicenses/ 3-Axis Piezo Nanopositioner Build for $500 Electroless Plating Build for $500 Optical Spectrometer [image] Cover Hot Plate Cover Lithography Stepper V2 Carnegie Mellon Cover Vacuum Spin Coater V1 Carnegie Mellon Cover Thermal Evaporator V1 (work in progress) Carnegie Mellon Cover Tube Furnace V1 (work in progress) Projects in Flight Cover Plasma Etcher Plasma Etch PE-25 Cover DIY SMU Buy for $800 Cover Probe Station V1 for $125 for $3,708 for $200 for $15,000 for $200 for $17,400 for $15,800 Buy SOP Build SOP Build SOP Build SOP Build SOP Buy SOP Buy SOP